High-Purity Mo target for Thin Film Deposition
Short Description:
Premium quality Molybdenum Planar Targets optimized for consistent thin film deposition in research and industrial PVD processes. Available in circular and rectangular shapes with various purity grades. ISO-certified production with full material traceability and technical support....
- Material Grade: 99.95% Mo (Pure) | MoLa (Lanthanum Alloy) | TZM Alloy
- Density: 10.2 g/cm³
- Diameter: customizable
- Application: PVD Coating for IC & Display
- Melting Point : 2620°C
Product Details
Product Tags
Our High-Purity Molybdenum Planar Sputtering Targets are precision-engineered for reliable thin film deposition in advanced manufacturing and research applications. Manufactured with strict quality control, these planar targets deliver consistent performance, excellent film quality, and extended operational life in various PVD systems.
Key Features & Benefits
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Exceptional Purity: Available in 99.95%, and high purity grades to meet diverse application requirements
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Superior Density: ≥99.5% theoretical density minimizes arcing and ensures stable deposition rates
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Optimized Microstructure: Controlled grain size (typically 10-50μm) promotes uniform erosion and consistent film thickness
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Versatile Bonding Options: Available unbonded or bonded to copper, aluminum, or stainless steel backing plates
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Custom Configurations: Tailored diameters, thicknesses, and shapes to match your specific chamber requirements
Technical Specifications
| Parameter | Specification |
|---|---|
| Material | Pure Molybdenum (Mo) |
| Purity | 99.95% (3N5), |
| Density | ≥ 10.2 g/cm³ (≥99.5% of theoretical) |
| Standard Shapes | Circular, Rectangular, Square |
| Diameter Range | 1" to 20" (25mm to 500mm) |
| Thickness Range | 0.125" to 1" (3mm to 25mm) |
| Surface Finish | Ra ≤ 0.8μm (standard), finer finishes available |
| Grain Size | 10-50μm (can be controlled per requirement) |
| Bonding Options | Unbonded, Soldered, Brazed, Clamped |
| Certifications | Material Test Certificates, ISO 9001 |
Applications
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Semiconductor Industry: Diffusion barriers, adhesion layers, and gate electrodes in IC fabrication
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Flat Panel Displays: Conductive layers for LCD, OLED, and touch panel manufacturing
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Solar Energy: Back contact layers in CIGS and thin-film photovoltaic cells
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Optical Coatings: Reflective layers for mirrors and precision optical components
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Tribological Coatings: Wear-resistant surfaces for cutting tools and mechanical parts
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Research & Development: Thin film studies, superconducting films, and advanced material research
Quality Assurance
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Full Traceability: Each target includes material certification with complete production history
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Rigorous Testing: Ultrasonic inspection, metallographic analysis, and dimensional verification
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Performance Validation: Pre-shipment testing to ensure meeting specified requirements
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Clean Packaging: Vacuum-sealed packaging to prevent oxidation and contamination
Customization Services
We specialize in custom-engineered planar targets:
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Non-Standard Dimensions: Any diameter, thickness, or rectangular size
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Special Purity Requirements: Ultra-high purity or doped molybdenum compositions
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Unique Bonding Solutions: Custom bonding for high-power applications
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Surface Treatments: Special polishing, cleaning, or coating for specific processes
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Rapid Prototyping: Quick turnaround for development and testing purposes
Ordering Information
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Standard Items: Typically shipped within 2-4 weeks
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Custom Orders: Lead time 4-8 weeks depending on complexity
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Minimum Order Quantity: Flexible MOQ for both standard and custom products
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Global Shipping: Reliable international delivery with proper documentation
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Technical Support: Expert assistance with target selection and process optimization
Why Choose Our Molybdenum Planar Targets?
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Technical Expertise: Over decades of experience in refractory metal target manufacturing
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Quality Commitment: Stringent process controls from raw material to finished product
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Application Knowledge: Deep understanding of thin film deposition processes and requirements
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Customer Focus: Responsive support and customized solutions for unique challenges
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Competitive Value: Optimal balance of performance, reliability, and cost-effectiveness
Contact us today for a quotation, technical consultation, or sample request. Our engineering team is ready to help you select the ideal molybdenum planar sputtering target for your specific application requirements.
