Mo Planar Target for PVD Coating
High-Purity Molybdenum Planar Target for Advanced PVD Coating
Engineered for excellence in Physical Vapor Deposition (PVD), our Molybdenum Planar Targets are the cornerstone of reliable, high-performance thin-film coating processes. These targets are precision-manufactured from high-purity molybdenum to deliver consistent, high-quality metallic or compound films essential for enhancing surface properties across a wide range of industrial applications.
Core Advantages for PVD Coating
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Superior Film Quality: Produces dense, adherent films with excellent uniformity and low defect rates, critical for functional and protective coatings.
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High Deposition Rate & Efficiency: Optimized density and microstructure ensure efficient material utilization and faster coating cycles.
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Extended Target Life: High-density manufacturing minimizes particle generation and abnormal erosion, providing longer operational life and reduced cost-per-run.
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Process Stability: Delivers consistent electrical and thermal performance throughout its lifetime, ensuring repeatable coating results.
Technical Specifications
| Parameter | Specification | Details / Benefit |
|---|---|---|
| Material | Pure Molybdenum (Mo) | Excellent high-temperature stability and conductivity. |
| Purity | 99.95% (3N5) Standard | Ensures high-purity coating films. 99.99% (4N) available. |
| Density | ≥ 99% of Theoretical | Minimizes arcing, ensures stable plasma. |
| Standard Shape | Planar (Circular, Rectangular) | Compatible with most standard PVD systems. |
| Standard Diameter | 2 inches to 8 inches | Common sizes for R&D and production. Custom sizes available. |
| Thickness | 0.125” to 0.250” (3mm to 6mm) | Standard range. Can be customized. |
| Surface Finish | Fine Ground Finish | Optimized for bonding and plasma ignition. |
Primary PVD Coating Applications
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Wear & Corrosion Resistance: Depositing hard, durable Mo or Mo-based compound films (e.g., MoN, MoC) on cutting tools, molds, and automotive components.
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Decorative Coatings: Providing a high-quality, silvery-metallic finish for consumer hardware, watches, and sanitary fittings.
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Functional Optical Layers: Used as a adhesion layer or as part of multi-layer stacks for precision optical components.
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Semiconductor & Electronics: Serving as a key material for diffusion barriers and conductive layers in micro-devices (higher purity grades recommended).
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Research & Development: Ideal for developing new coating materials and processes in laboratory settings.
Customization & Engineering Support
We understand that PVD processes vary. We offer tailored solutions:
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Custom Dimensions: Any diameter, rectangular size, or thickness to fit your chamber.
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Bonding Services: Reliable bonding to Cu, Al, or stainless steel backing plates for efficient cooling.
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Technical Consultation: Our experts can assist with target selection and process integration.
Quality Commitment
Every Mo Planar Target is backed by:
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Full Traceability: Material certification provided.
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Rigorous QC: Includes ultrasonic testing and dimensional verification.
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Secure Packaging: Vacuum-sealed to prevent oxidation during transit.
Ready to enhance your PVD coating process? Contact us for a quotation, technical data sheets, or to discuss your specific application needs.










