Molybdenum Components Play a Critical Role in MOCVD and CVD Systems

As MOCVD and CVD technologies continue to advance in the semiconductor, compound semiconductor, and advanced coating industries, equipment performance requirements are becoming increasingly stringent. High operating temperatures, ultra-clean environments, and long process cycles place exceptional demands on internal reactor components.

In this context, molybdenum has become a key refractory metal used in several critical areas of MOCVD and CVD systems, including susceptors, heat shields for showerheads, and rotation shaft rods.

Molybdenum Susceptors for Stable and Uniform Deposition

The susceptor plays a central role in temperature control and substrate support during deposition processes. Molybdenum susceptors are widely adopted in MOCVD and CVD reactors due to their excellent high-temperature strength, good thermal conductivity, and low vapor pressure under vacuum conditions.

These characteristics help maintain uniform temperature distribution, reduce contamination risk, and support consistent film quality in applications such as GaN, SiC, and LED epitaxial growth.

Heat Shields for Showerheads: Enhancing Thermal Efficiency

Showerhead assemblies are exposed to intense thermal radiation and reactive gases. Molybdenum heat shields installed around showerheads help minimize heat loss, protect sensitive components, and stabilize the temperature profile within the reaction chamber.

Thanks to molybdenum’s high melting point and resistance to thermal deformation, these heat shields maintain structural integrity during repeated thermal cycling and extended operating periods.

Rotation Shaft Rods for Reliable Reactor Operation

In many MOCVD reactor designs, rotating mechanisms are used to improve deposition uniformity. The rotation shaft rod, operating in or near the hot zone, must withstand a combination of high temperature, mechanical load, and vacuum conditions.

Molybdenum rotation shaft rods provide high rigidity, excellent creep resistance, and long-term dimensional stability, making them well suited for continuous operation in advanced MOCVD and CVD systems.

Molybdenum as a Preferred Material for Advanced Deposition Equipment

As deposition processes evolve toward higher throughput and tighter process windows, the importance of material reliability continues to grow. Molybdenum’s balanced thermal, mechanical, and vacuum-compatible properties make it a preferred choice for critical internal components.

From susceptors to heat shields and rotating shafts, precision-machined molybdenum components play an essential role in enhancing process stability, equipment lifetime, and overall production yield in modern MOCVD and CVD systems.